Ti 박막으로 부터 급속 열처리에 의한 $TiSi_2$ 형성에 관한 연구 = A study on the formation of $TiSi_2$ from thin Ti film by rapid thermal process

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Advisors
천성순researcher박신종researcherChun, Soung-SoonresearcherPark, Sin-Chongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1990
Identifier
61568/325007 / 000765001
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.2, [ iv, 137 p. ]

URI
http://hdl.handle.net/10203/50333
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61568&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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