고집적 DRO FRAM 소자용 PZT 박막 캐패시터의 신뢰성 연구Reliability study in PZT thin film capacitors for high-density DRO FRAM devices
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 181098/325007 / 000995255
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 2003.2, [ vi, 148 p. ]
- Keywords
PZT; 강유전체; 신뢰성; FRAM; depolarization; size effect; imprint
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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