산화-환원 ALD 증착법에 의해 형성된 Nickel 박막의 특성에 관한 연구A study on the nickel thin films formed by oxidation-reduction ALD
- Advisors
- 강상원researcher; Kang, Sang-Wonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2002
- Identifier
- 177275/325007 / 000975385
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ xi, 95 p. ]
- Keywords
니켈; 원자층 단위 증착법; Atomic Layer Deposition; glue layer; Nickel
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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