FRAM 소자 응용을 위한 ECR PECVD PZT 커패시터 특성에 미치는 전극의 영향Effect of electrodes on the characteristics of ECR PECVD PZT capacitors for the application to FRAM devices
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2002
- Identifier
- 174593/325007 / 000975316
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ vi, 171 p. ]
- Keywords
비휘발성메모리; 전극; 화학기상증착법; 강유전체; 박막; electrode; FRAM; CVD; ferroelectric; PZT
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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