FRAM 소자 응용을 위한 ECR PECVD PZT 커패시터 특성에 미치는 전극의 영향 = Effect of electrodes on the characteristics of ECR PECVD PZT capacitors for the application to FRAM devices

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2002
Identifier
174593/325007 / 000975316
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ vi, 171 p. ]

Keywords

비휘발성메모리; 전극; 화학기상증착법; 강유전체; 박막; electrode; FRAM; CVD; ferroelectric; PZT

URI
http://hdl.handle.net/10203/50253
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174593&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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