DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 안병태 | - |
dc.contributor.advisor | Ahn, Byung-Tae | - |
dc.contributor.author | 안진형 | - |
dc.contributor.author | Ahn, Jin-Hyung | - |
dc.date.accessioned | 2011-12-15T01:04:07Z | - |
dc.date.available | 2011-12-15T01:04:07Z | - |
dc.date.issued | 2002 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174587&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50247 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ v, 144 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 마이크로웨이브 | - |
dc.subject | 실리콘 | - |
dc.subject | 결정화 | - |
dc.subject | 박막트랜지스터 | - |
dc.subject | TFT | - |
dc.subject | microwave | - |
dc.subject | Si | - |
dc.subject | Crystallization | - |
dc.title | $NiCl_2$ 및 마이크로웨이브 가열을 이용한 비정질 Si 박막의 저온결정화에 관한 연구 | - |
dc.title.alternative | Low temperature crystallization amorphous Si thin films using $NiCl_2$ and microwave heating | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 174587/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000985209 | - |
dc.contributor.localauthor | 안진형 | - |
dc.contributor.localauthor | Ahn, Jin-Hyung | - |
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