MEMS 소자의 응용을 위한 실리콘 기판 위에 형성된 PZT 후막의 제조 및 평가Fabrication and characterization of the PZT thick film on Silicon substrate for MEMS applications
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 노광수 | - |
| dc.contributor.advisor | No, Kwang-Soo | - |
| dc.contributor.author | 전용배 | - |
| dc.contributor.author | Jeon, Yong-Bae | - |
| dc.date.accessioned | 2011-12-15T01:03:53Z | - |
| dc.date.available | 2011-12-15T01:03:53Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165773&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50234 | - |
| dc.description | 학위논문(박사) - 한국과학기술원: 재료공학과, 2001.2, [ ix, 148 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 확산방지막 | - |
| dc.subject | 스크린 프린팅 | - |
| dc.subject | 후막 | - |
| dc.subject | 압전체 | - |
| dc.subject | 초소형정밀기계 | - |
| dc.subject | MEMS | - |
| dc.subject | diffusion barrier | - |
| dc.subject | screen printing | - |
| dc.subject | PZT thick film | - |
| dc.subject | piezoelectric | - |
| dc.title | MEMS 소자의 응용을 위한 실리콘 기판 위에 형성된 PZT 후막의 제조 및 평가 | - |
| dc.title.alternative | Fabrication and characterization of the PZT thick film on Silicon substrate for MEMS applications | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 165773/325007 | - |
| dc.description.department | 한국과학기술원: 재료공학과, | - |
| dc.identifier.uid | 000975342 | - |
| dc.contributor.localauthor | 전용배 | - |
| dc.contributor.localauthor | Jeon, Yong-Bae | - |
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