Reactive magnetron sputter ion plating법으로 증착된 TiN 박막의 증착 특성 및 침식 특성에 관한 연구Deposition characteristics and liquid impingement erosion properties of TiN film fabricated by reactive magnetron sputter ion plating
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 이민구 | - |
| dc.contributor.author | Lee, Min-Ku | - |
| dc.date.accessioned | 2011-12-15T01:03:39Z | - |
| dc.date.available | 2011-12-15T01:03:39Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143459&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50221 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.2, [ xiii, 165 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 티타늄나이트라이드 | - |
| dc.subject | 이온 플레이팅 | - |
| dc.subject | 침식 | - |
| dc.subject | Liquid impact erosion | - |
| dc.subject | TiN | - |
| dc.subject | Ion plating | - |
| dc.title | Reactive magnetron sputter ion plating법으로 증착된 TiN 박막의 증착 특성 및 침식 특성에 관한 연구 | - |
| dc.title.alternative | Deposition characteristics and liquid impingement erosion properties of TiN film fabricated by reactive magnetron sputter ion plating | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 143459/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000945282 | - |
| dc.contributor.localauthor | 이민구 | - |
| dc.contributor.localauthor | Lee, Min-Ku | - |
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