마이크로웨이브에 의한 비정질 실리콘의 저온 고상결정화 거동에 관한 연구 = A study on the low-temperature solid phase crystallization behavior of amorphous silicon thin films by microwave heating

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Advisors
안병태researcherAhn, Byung-Taeresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
128167/325007 / 000935280
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ x, 138 p. ]

Keywords

고상결정화; 마이크로웨이브 가열; 저온 결정화; Low temperature crystallizaiton; Solid phase crystallization; Microwave heating

URI
http://hdl.handle.net/10203/50187
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128167&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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