Cu/TiN/Ti/Si 다층막의 열처리에 관한 연구 = A study on the annealing of the Cu/TiN/Ti/Si Multilayer

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dc.contributor.advisor박종욱-
dc.contributor.advisor천성순-
dc.contributor.advisorPark, Chong-Ook-
dc.contributor.advisorChyun, Soung-Soon-
dc.contributor.author라사균-
dc.contributor.authorRha, Sa-Kyun-
dc.date.accessioned2011-12-15T01:02:56Z-
dc.date.available2011-12-15T01:02:56Z-
dc.date.issued1997-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128140&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50178-
dc.description학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ iii, 151 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject티타늄 나이트라이드-
dc.subject확산방지-
dc.subject배선재료-
dc.subjectCopper-
dc.subjectAnnealing-
dc.subjectTitaniun nitride-
dc.subjectDiffusion barrier-
dc.subjectInterconnection-
dc.subject구리-
dc.subject열처리-
dc.titleCu/TiN/Ti/Si 다층막의 열처리에 관한 연구 = A study on the annealing of the Cu/TiN/Ti/Si Multilayer-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN128140/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000945148-
dc.contributor.localauthor라사균-
dc.contributor.localauthorRha, Sa-Kyun-
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MS-Theses_Ph.D.(박사논문)
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