학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ iii, 151 p. ]
티타늄 나이트라이드; 확산방지; 배선재료; Copper; Annealing; Titaniun nitride; Diffusion barrier; Interconnection; 구리; 열처리
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