금속흡착에 의한 LPCVD 비정질 실리콘 박막의 저온 결정화에 관한 연구A study on low temperature crystallization of LPCVD amorphous Si using metal adsorption method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 손동균 | - |
| dc.contributor.author | Sohn, Dong-Kyun | - |
| dc.date.accessioned | 2011-12-15T01:02:53Z | - |
| dc.date.available | 2011-12-15T01:02:53Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113012&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50175 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ xvi, 208 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 비정질 실리콘 | - |
| dc.subject | 금속흡착 | - |
| dc.subject | 저온결정화 | - |
| dc.subject | 결정질 실리콘 | - |
| dc.subject | Polycrystalline silicon | - |
| dc.subject | Amorphous silicon | - |
| dc.subject | Metal adosrption | - |
| dc.subject | Low temperature crystallization | - |
| dc.title | 금속흡착에 의한 LPCVD 비정질 실리콘 박막의 저온 결정화에 관한 연구 | - |
| dc.title.alternative | A study on low temperature crystallization of LPCVD amorphous Si using metal adsorption method | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 113012/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000935188 | - |
| dc.contributor.localauthor | 손동균 | - |
| dc.contributor.localauthor | Sohn, Dong-Kyun | - |
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