금속흡착에 의한 LPCVD 비정질 실리콘 박막의 저온 결정화에 관한 연구 = A study on low temperature crystallization of LPCVD amorphous Si using metal adsorption method

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Advisors
안병태researcherAhn, Byung-Taeresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
113012/325007 / 000935188
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ xvi, 208 p. ]

Keywords

비정질 실리콘; 금속흡착; 저온결정화; 결정질 실리콘; Polycrystalline silicon; Amorphous silicon; Metal adosrption; Low temperature crystallization

URI
http://hdl.handle.net/10203/50175
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113012&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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