마이크로웨이브 플라즈마 화학증착법에 의한 다이아몬드 박막의 Heteroepitaxy 성장에 관한 연구 = The study on the heteroepitaxial growth of diamond films synthesized by microwave plasma enhanced chemical vapor deposition

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Advisors
이재영Lee, Jai-Young
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
112997/325007 / 000925074
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 164 p. ]

Keywords

음극바이어스; 핵생성; 헤테로에피텍시 성장; 다이아몬드; 플라즈마 화학증착; CVD plasma; Negative bias; Nucleation; Heteroepitaxy growth; Diamond

URI
http://hdl.handle.net/10203/50167
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=112997&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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