타이타늄실리사이드 박막의 응집현상과 응력의 영향에 관한 연구Study on the agglomeration of TiSi2 thin film and stress effect
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박중근 | - |
| dc.contributor.advisor | Park, Joong-Keun | - |
| dc.contributor.author | 나종주 | - |
| dc.contributor.author | Rha, Jong-Joo | - |
| dc.date.accessioned | 2011-12-15T01:02:38Z | - |
| dc.date.available | 2011-12-15T01:02:38Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=112988&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50160 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 135 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 타이타늄실리사이드 | - |
| dc.subject | Stress | - |
| dc.subject | Grain | - |
| dc.subject | Agglomeration | - |
| dc.subject | Thin film | - |
| dc.subject | TiSi2 | - |
| dc.subject | 응력 | - |
| dc.subject | 박막 | - |
| dc.subject | 응집 | - |
| dc.subject | 결정립 | - |
| dc.title | 타이타늄실리사이드 박막의 응집현상과 응력의 영향에 관한 연구 | - |
| dc.title.alternative | Study on the agglomeration of TiSi2 thin film and stress effect | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 112988/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000865121 | - |
| dc.contributor.localauthor | 나종주 | - |
| dc.contributor.localauthor | Rha, Jong-Joo | - |
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