다결정 실리콘 패드와 이중 절연막을 이용한 신구조 안티퓨즈 소자 연구 = Study on the new antifuse device with double dielectric layers on a poly-silicon pad

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Advisors
안병태researcherAhn, Byung-Taeresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
106088/325007 / 000925160
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.2, [ vii, 136 p. ]

Keywords

안티퓨즈; 절연막; 패드; 다결정 실리콘; 소자; Device; Antifuse; Dielectric; Pad; Poly-Si

URI
http://hdl.handle.net/10203/50139
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106088&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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