다결정 실리콘 패드와 이중 절연막을 이용한 신구조 안티퓨즈 소자 연구Study on the new antifuse device with double dielectric layers on a poly-silicon pad
- Advisors
- 안병태researcher; Ahn, Byung-Taeresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106088/325007 / 000925160
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.2, [ vii, 136 p. ]
- Keywords
안티퓨즈; 절연막; 패드; 다결정 실리콘; 소자; Device; Antifuse; Dielectric; Pad; Poly-Si
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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