Reactive RF sputtering 법으로 제조한 ALN박막의 성장기구에 관한 연구A study on the growth mechanism of ALN thin films by reactive RF sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이재영 | - |
| dc.contributor.advisor | Lee, Jai-Young | - |
| dc.contributor.author | 이환철 | - |
| dc.contributor.author | Lee, Hwan-Chul | - |
| dc.date.accessioned | 2011-12-15T01:01:48Z | - |
| dc.date.available | 2011-12-15T01:01:48Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69690&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50109 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1994.8, [ v, 151 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | RF sputtering (Physics) | - |
| dc.title | Reactive RF sputtering 법으로 제조한 ALN박막의 성장기구에 관한 연구 | - |
| dc.title.alternative | A study on the growth mechanism of ALN thin films by reactive RF sputtering | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 69690/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000885390 | - |
| dc.contributor.localauthor | 이환철 | - |
| dc.contributor.localauthor | Lee, Hwan-Chul | - |
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