Reactive RF sputtering 법으로 제조한 ALN박막의 성장기구에 관한 연구 = A study on the growth mechanism of ALN thin films by reactive RF sputtering

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Advisors
이재영Lee, Jai-Young
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
69690/325007 / 000885390
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1994.8, [ v, 151 p. ]

Keywords

RF sputtering (Physics)

URI
http://hdl.handle.net/10203/50109
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69690&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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