PEVED 법에 의한 μC-Si:H 박막의 성장과 a-Si 박막의 고상결정화 = Growth of μC-Si films and solid phase recrystallization of a-Si films deposited by PECVD

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Advisors
임호빈researcherIm, Ho-Binresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
69016/325007 / 000885137
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1994.2, [ v, 105 p. ]

Keywords

Silicon hydride.

URI
http://hdl.handle.net/10203/50099
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69016&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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