플라즈마 화학증착으로 제조한 수소함유 비정질 탄소의 증착기구와 특성의 상호관계에 관한 연구A study on the interrelation between deposition mechanism and characteristics of hydragenated amorphous carbon prepared by plasma chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이재영 | - |
| dc.contributor.advisor | Lee, Jai-Young | - |
| dc.contributor.author | 김명현 | - |
| dc.contributor.author | Kim, Myong-Hyon | - |
| dc.date.accessioned | 2011-12-15T01:00:50Z | - |
| dc.date.available | 2011-12-15T01:00:50Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61580&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50049 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ viii, 135 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 플라즈마 화학증착으로 제조한 수소함유 비정질 탄소의 증착기구와 특성의 상호관계에 관한 연구 | - |
| dc.title.alternative | A study on the interrelation between deposition mechanism and characteristics of hydragenated amorphous carbon prepared by plasma chemical vapor deposition | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61580/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000845043 | - |
| dc.contributor.localauthor | 김명현 | - |
| dc.contributor.localauthor | Kim, Myong-Hyon | - |
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- MS-Theses_Ph.D.(박사논문)
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