열산화 조건과 열처리 조건이 Silicon 위에 형성한 tantalum oxide 의 성질에 미치는 영향 = Effects of oxidation and annealing conditions on the properties of tantalum oxide films on silicon substrates

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Advisors
임호빈researcherIm, Ho-Binresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1992
Identifier
59867/325007 / 000825110
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1992.2, [ iv, [101] p. ]

Keywords

산화탄탈; Tantalum oxides

URI
http://hdl.handle.net/10203/49941
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=59867&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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