Fe-base 및 Ni-base alloy 위에 증착된 TiN 박막의 증착특성 및 전기화학적 특성 = Deposition characteristics and electrochemical properties of TiN films deposited on Fe-base alloy and Ni-base alloy

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dc.contributor.advisor천성순-
dc.contributor.advisorChun, Soung-Soon-
dc.contributor.author인치범-
dc.contributor.authorIn, Chi-Bum-
dc.date.accessioned2011-12-15-
dc.date.available2011-12-15-
dc.date.issued1995-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99215&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/49919-
dc.description학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ v, 182 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subjectChemical vapor deposition-
dc.subject질화티타늄-
dc.titleFe-base 및 Ni-base alloy 위에 증착된 TiN 박막의 증착특성 및 전기화학적 특성 = Deposition characteristics and electrochemical properties of TiN films deposited on Fe-base alloy and Ni-base alloy-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN99215/325007-
dc.description.department한국과학기술원 : 전자재료공학과, -
dc.identifier.uid000895417-
dc.contributor.localauthor인치범-
dc.contributor.localauthorIn, Chi-Bum-
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