Fe-base 및 Ni-base alloy 위에 증착된 TiN 박막의 증착특성 및 전기화학적 특성 = Deposition characteristics and electrochemical properties of TiN films deposited on Fe-base alloy and Ni-base alloy

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
99215/325007 / 000895417
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ v, 182 p. ]

Keywords

Chemical vapor deposition; 질화티타늄

URI
http://hdl.handle.net/10203/49919
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99215&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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