DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 천성순 | - |
dc.contributor.advisor | Chun, Soung-Soon | - |
dc.contributor.author | 김일 | - |
dc.contributor.author | Kim, Il | - |
dc.date.accessioned | 2011-12-15 | - |
dc.date.available | 2011-12-15 | - |
dc.date.issued | 1995 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99213&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/49917 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ vi, 136 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | 플라즈마 화학증착법에 의해 제조된 기억소자용 고유전 탄탈륨 산화박막에 관한 연구 | - |
dc.title.alternative | PECVD $Ta_2O_5$ dielectric thin films for memory devices | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 99213/325007 | - |
dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
dc.identifier.uid | 000895089 | - |
dc.contributor.localauthor | 김일 | - |
dc.contributor.localauthor | Kim, Il | - |
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