기상유도결정화 및 RTA 공정에 의한 다결정 Si 박막의 제조 및 다결정 Si 박막 트랜지스터 특성에 관한 연구Fabrication of polycrystalline Si films by vapor-induced crystallization and rapid thermal annealing process and characterization of polycrystalline Si thin film transistors

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dc.contributor.advisor안병태-
dc.contributor.advisorAhn, Byung-Tae-
dc.contributor.author양용호-
dc.contributor.authorYang, Yong-Ho-
dc.date.accessioned2011-12-15-
dc.date.available2011-12-15-
dc.date.issued2011-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=466406&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/49886-
dc.description학위논문(박사) - 한국과학기술원 : 신소재공학과, 2011.2, [ vi, 129 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subjectpoly-Si-
dc.subjectTFT-
dc.subjectRTA-
dc.subjectVIC-
dc.subject박막트랜지스터-
dc.subject폴리실리콘-
dc.subject급속열처리-
dc.subject기상유도결정화-
dc.title기상유도결정화 및 RTA 공정에 의한 다결정 Si 박막의 제조 및 다결정 Si 박막 트랜지스터 특성에 관한 연구-
dc.title.alternativeFabrication of polycrystalline Si films by vapor-induced crystallization and rapid thermal annealing process and characterization of polycrystalline Si thin film transistors-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN466406/325007 -
dc.description.department한국과학기술원 : 신소재공학과, -
dc.identifier.uid020075102-
dc.contributor.localauthor양용호-
dc.contributor.localauthorYang, Yong-Ho-
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MS-Theses_Ph.D.(박사논문)
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