학위논문(박사) - 한국과학기술원 : 신소재공학과, 2011.2, [ vi, 145 p. ]
기상유도결정화; 금속유도성장; 박막트랜지스터; 다결정 실리콘; 알루미늄 클로라이드; aluminum chloride; vapor-induced crystallization; metal-induced growth; thin film transistor; polycrystalline silicon
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