금속유도성장법과 기상유도결정화법을 이용한 저온 다결정 Si 박막 제조에 관한 연구 = Low temperature fabrication of poly-Si film by metal-induced growth and vapor-induced crystallization

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Advisors
안병태researcherAhn, Byung-Taeresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2011
Identifier
466405/325007  / 020065091
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2011.2, [ vi, 145 p. ]

Keywords

기상유도결정화; 금속유도성장; 박막트랜지스터; 다결정 실리콘; 알루미늄 클로라이드; aluminum chloride; vapor-induced crystallization; metal-induced growth; thin film transistor; polycrystalline silicon

URI
http://hdl.handle.net/10203/49885
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=466405&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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