(A) study on the ruthenium thin films formed by atomic layer deposition (ALD)ALD 증착법으로 형성된 ruthenium 박막의 특성에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.author | Kwon, Oh-Kyum | - |
| dc.contributor.author | 권오겸 | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=240659&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49805 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.8, [ xi, 123 p. ] | - |
| dc.language | eng | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | ANODE | - |
| dc.subject | ADHESION LAYERY | - |
| dc.subject | ALD | - |
| dc.subject | RU | - |
| dc.subject | TRANSITION METAL OXIDE | - |
| dc.subject | Si | - |
| dc.subject | 접착력 개선 속산화물 | - |
| dc.subject | 원자층 증착법 | - |
| dc.subject | Ru | - |
| dc.subject | SI | - |
| dc.title | (A) study on the ruthenium thin films formed by atomic layer deposition (ALD) | - |
| dc.title.alternative | ALD 증착법으로 형성된 ruthenium 박막의 특성에 관한 연구 | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 240659/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020015025 | - |
| dc.contributor.localauthor | Kwon, Oh-Kyum | - |
| dc.contributor.localauthor | 권오겸 | - |
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