Ru 전구체의 열분해 메카니즘과 Ru 박막의 화학기상 증착Thermal decomposition mechanism of Ru precursor and chemical vapor deposition of Ru films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 노광수 | - |
| dc.contributor.advisor | No, Kwang-Soo | - |
| dc.contributor.author | 최종완 | - |
| dc.contributor.author | Choi, Jong-Wan | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237608&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49803 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ viii, 117 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 단차 피복성 | - |
| dc.subject | 메모리 | - |
| dc.subject | 전극 | - |
| dc.subject | 화학기상 증착법 | - |
| dc.subject | 전구체 | - |
| dc.subject | PRECURSOR | - |
| dc.subject | STEP COVERAGE | - |
| dc.subject | IR | - |
| dc.subject | RU | - |
| dc.subject | CVD | - |
| dc.title | Ru 전구체의 열분해 메카니즘과 Ru 박막의 화학기상 증착 | - |
| dc.title.alternative | Thermal decomposition mechanism of Ru precursor and chemical vapor deposition of Ru films | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 237608/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 000995383 | - |
| dc.contributor.localauthor | 최종완 | - |
| dc.contributor.localauthor | Choi, Jong-Wan | - |
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- MS-Theses_Ph.D.(박사논문)
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