실리콘계 유전 박막의 원자층 증착에 관한 연구 = Atomic layer deposition of Si-based dielectric thin films

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Advisors
박종욱researcherPark, Chong-Ookresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
237605/325007  / 020005248
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ ix, 115 p. ]

Keywords

원자층 증착; ATOMIC LAYER DEPOSITION

URI
http://hdl.handle.net/10203/49800
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237605&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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