실리콘계 유전 박막의 원자층 증착에 관한 연구Atomic layer deposition of Si-based dielectric thin films
- Advisors
- 박종욱researcher; Park, Chong-Ookresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 237605/325007 / 020005248
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ ix, 115 p. ]
- Keywords
원자층 증착; ATOMIC LAYER DEPOSITION
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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