MEMS용 미세재료의 기계적 특성에 미치는 미세조직의 영향 = Effect of microstructure on mechanical properties of micro-materials for MEMS applications

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Advisors
홍순형researcherHong, Soon-Hyungresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
237584/325007  / 000995024
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ xv, 254 p. ]

Keywords

나노인덴테이션 시험; 미세인장 시험; 구리 박막; 기계적 특성; 집합조직; TEXTURE; NANOINDENTATION TEST; MICRO-TENSILE TEST; CU THIN FILM; MECHANICAL PROPERTIES

URI
http://hdl.handle.net/10203/49779
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237584&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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