Multi-alicyclic polymers for application in 193 nm lithography = 다지환족 고분자의 합성과 193 nm 리소그라피용 레지스트로서의 응용

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 244
  • Download : 0
Fully multi-alicylic polymers designed for use as 193nm photoresist materials are obtained by vinyl addition polymerization of tetracarbocyclic norbornene derivatives,t-butyl tetracyclo$[4.4.0.1.^{2,5} 1^{7,10}]$dodec-8-ene-3-carboxylate (t-BDN) and 3-acetoxytetracyclo$[4.4.0.1.^{2,5} 1^{7,10}]$dodec-8-ene (AcODN). The alicyclic polymer backbones of these polymers provide plasma etch resistance, good mechanical properties,and stability toward radiation. For the lithographic applications were provided by carefully tailored two kinds of pendant groups: t-butyl carboxylate group as a carboxylic acid functionality masked by a protecting group. The protecting group undergoes acid-catalyzed thermolysis. The acetoxy polar group influences adhesion, wettability and solubility properties of the polymers. The polymer showed an acceptable high transmittance at 193nm and good adhesion property. The plasma etch rates of the copolymer poly(t-BDN-co-AcODN) (85:15) by $CF_4/CHF_3$ mixed gas were 1.01 times with respect to a novolac based resist. 0.2-㎛ line-and-space patterns were obtained at a dose of $45 mJ cm^{-2}$ using KrF excimer laser stepper. The low UV absorption by the polymer at 193nm and its high resistance to reactive ion etching along with alkaline developability make these copolymers an attractive resist system for 193nm lithography.
Advisors
Cho, I-Whan조의환
Description
한국과학기술원 : 신소재공학학제전공,
Publisher
한국과학기술원
Issue Date
2001
Identifier
165010/325007 / 000959505
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 신소재공학학제전공, 2001.2, [ xii, 96 p. ]

Keywords

Norbornene derivatives; Muti-alicyclic polymer; ArF Photoresist; Dry-etching Resistance; 건식내에칭성; 노르보르넨 유도체; 다지환족 고분자; ArF 레지스트

URI
http://hdl.handle.net/10203/49774
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165010&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0