RF magnetron sputtering 증착공정에서 플라즈마 특성과 비정질 $CN_x$ 박막성질의 상관관계에 관한 연구A study on the correlation between the plasma and amorphous $CN_x$ film characteristics using RF magnetron sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 최시경 | - |
| dc.contributor.advisor | Choi, Si-Kyung | - |
| dc.contributor.author | 노기민 | - |
| dc.contributor.author | Roh, Ki-Min | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 2011 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=466401&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49665 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2011.2, [ vii, 73 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 경도 | - |
| dc.subject | 마그네트론 스퍼터링 | - |
| dc.subject | 플라즈마 | - |
| dc.subject | 질화탄소박막 | - |
| dc.subject | 퓨리에변환 `적외선 분광 감지법 | - |
| dc.subject | FTIR | - |
| dc.subject | hardness | - |
| dc.subject | magnetron sputtering | - |
| dc.subject | plasma | - |
| dc.subject | Carbon nitride | - |
| dc.title | RF magnetron sputtering 증착공정에서 플라즈마 특성과 비정질 $CN_x$ 박막성질의 상관관계에 관한 연구 | - |
| dc.title.alternative | A study on the correlation between the plasma and amorphous $CN_x$ film characteristics using RF magnetron sputtering | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 466401/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020055825 | - |
| dc.contributor.localauthor | 노기민 | - |
| dc.contributor.localauthor | Roh, Ki-Min | - |
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