Fabrication of carbon nanotube tips for a high-brightness microfocus X-ray tube = 고휘도 마이크로빔 X선원용 탄소나노튜브 팁 제작

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A high brightness microfocus x-ray tube requires a high brightness electron beam with a diameter under 5 μm and current over 25 μA to reach the x-ray target. As a electron beam source, carbon nanotube (CNT) on tungsten tip was used. For the fabrication of CNT on tungsten tip, two methods were used: dielectrophoresis and ICP-CVD (Inductively Coupled Plasma Chemical Vapor Deposition). Dielectrophoresis is a useful technique that can manipulate and assemble small objects into predetermined patterns by interactions between the external electrical field and the induced dipole moment. Optimized fabrication of CNT was made using various parameters such as the initial conditions of the CNT, the distance between tip and the electrode, dc voltage. ICP-CVD uses plasma and has concept of development to optimize carbon nanotube fabrication. Ni was used as a catalyst and TiN was used as buffer layer and CNT was then fabricated by it. The fabrication of short carbon nanotube tips by dielectrophoresis and ICP-CVD is reported in this paper. Alinged CNT tips comprising either singlewall carbon nantube (SWNT) bundle or multiwalled nanotubes (MWNT) of controlled length and orientation were assembled. Beam generation was evaluated, using CNT as an electron source and phosporous screen as an anode. Simulation of electron beam track and current generated from CNT were evaluated. The result of electron beam generation using CNT tip as a first step for a high brightness microfocus x-ray tube is reported.
Advisors
Cho, Sung-Ohresearcher조성오researcher
Description
한국과학기술원 : 원자력및양자공학과,
Publisher
한국과학기술원
Issue Date
2006
Identifier
255366/325007  / 020043086
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 원자력및양자공학과, 2006.2, [ vii, 60 p. ]

URI
http://hdl.handle.net/10203/49501
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=255366&flag=dissertation
Appears in Collection
NE-Theses_Master(석사논문)
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