Until now, the development of the useful microelectromechanical systems has the problems because previous batteries (solar, chemical, etc) did not satisfy the requirements related to power supply. At this point of time, nuclear battery using isotope sources is rising the solution of this problem. Nuclear battery can provide superior out-put power and lifetime. So a new type of micro power source (nuclear battery) for microelectromechanical systems has been designed and analyzed. In this work, I designed the three parts, isotope source, conversion device, and shielding. I chose suitable sources, and designed semiconductor using the chosen isotope sources. Power is generated by radiation exciting electrons in the semiconductor depletion region. The efficiency of the nuclear battery depends upon the pn-junction. In this study the several conceptual nuclear batteries using radioactive materials are described with pn-junction. And for the safety, I designed the shielding to protect the environment by reducing the kinetic energy of beta particles.