Study of power coupling experiments in a large-area transformer coupled plasma source대면적 transformer coupled plasma 원에서 파워 결합 실험에 관한 연구

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dc.contributor.advisorHwang, Yong-Seok-
dc.contributor.advisor황용석-
dc.contributor.authorKim, Hee-Joon-
dc.contributor.author김희준-
dc.date.accessioned2011-12-14T08:15:19Z-
dc.date.available2011-12-14T08:15:19Z-
dc.date.issued1998-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133483&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/49380-
dc.description학위논문(석사) - 한국과학기술원 : 원자력공학과, 1998.2, [ vi, 41 p. ]-
dc.description.abstractA large-area transformer coupled plasma (TCP) source has been designed and constructed. In this design, a plasma generation chamber and a RF (Radio-Frequency) antenna chamber have been separated with dielectric material, and differentially pumped to accommodate large-area, relatively thin dielectric window against mechanical pressures. With large diameter (78cm) chamber, low frequency (4-5MHz) RF source has been chosen. By calculating plasma impedance from TCPRP code based on 2D heating theory, the diameter of a single-turn copper coil antenna was optimized to provide high-density plasmas in large area. Also the impedance matching circuit of this large-area TCP source has been designed from the calculated plasma impedance. Large-area helium plasma was successfully generated and used to study power coupling in this source using the single-turn antenna. E-H transition phenomenon was observed, and threshold current was measured. Threshold current and power were measured to be lower at low pressure than at high pressure, and look to be linear with pressure. In H-mode antenna impedance and reactance decrease as RF power increases. This means that increased mutual inductance between antenna and plasma loop decreases primary side inductance as plasma density increase. Power transfer is more efficient at low pressure than high pressure. From these results, optimum pressure range is observed to be 1-10mTorr.eng
dc.languageeng-
dc.publisher한국과학기술원-
dc.subjectLarge-area-
dc.subjectTransformer coupled plasma-
dc.subjectPower coupling-
dc.subject대면적-
dc.subject출력 결합-
dc.subject유도결합 플라즈마-
dc.subjectTCP-
dc.titleStudy of power coupling experiments in a large-area transformer coupled plasma source-
dc.title.alternative대면적 transformer coupled plasma 원에서 파워 결합 실험에 관한 연구-
dc.typeThesis(Master)-
dc.identifier.CNRN133483/325007-
dc.description.department한국과학기술원 : 원자력공학과, -
dc.identifier.uid000963194-
dc.contributor.localauthorKim, Hee-Joon-
dc.contributor.localauthor김희준-
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NE-Theses_Master(석사논문)
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