학위논문(석사) - 한국과학기술원 : 물리학과, 2009.2, [ vi, 50 p. ]
RPG; remote plasma generator; ferrite; transformer coupled plasma; plasma sustenance condition; 원격플라즈마장치; 페라이트; 변압기 결합형 플라즈마; 플라즈마 지속조건
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