그리드를 장착한 DC 마그네트론 스퍼터링 플라즈마의 특성 연구Plasma characteristics of DC magnetron sputtering source with grids
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 장홍영 | - |
| dc.contributor.advisor | Chang, Hong-Young | - |
| dc.contributor.author | 인정환 | - |
| dc.contributor.author | In, Jeong-Hwan | - |
| dc.date.accessioned | 2011-12-14T07:57:55Z | - |
| dc.date.available | 2011-12-14T07:57:55Z | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237794&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48662 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 2004.2, [ iv, 35 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | DC 마그네트론 스퍼터링 소스 | - |
| dc.subject | single Langmuir probe | - |
| dc.subject | plasma | - |
| dc.subject | DC magnetron sputtering source | - |
| dc.subject | 진단 | - |
| dc.subject | 단일 랑뮤어 탐침 | - |
| dc.subject | 플라즈마 | - |
| dc.subject | diagnostics | - |
| dc.title | 그리드를 장착한 DC 마그네트론 스퍼터링 플라즈마의 특성 연구 | - |
| dc.title.alternative | Plasma characteristics of DC magnetron sputtering source with grids | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 237794/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 020013502 | - |
| dc.contributor.localauthor | 인정환 | - |
| dc.contributor.localauthor | In, Jeong-Hwan | - |
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- PH-Theses_Master(석사논문)
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