그리드를 장착한 DC 마그네트론 스퍼터링 플라즈마의 특성 연구 = Plasma characteristics of DC magnetron sputtering source with grids

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Advisors
장홍영researcherChang, Hong-Youngresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
237794/325007  / 020013502
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 2004.2, [ iv, 35 p. ]

Keywords

DC 마그네트론 스퍼터링 소스; single Langmuir probe; plasma; DC magnetron sputtering source; 진단; 단일 랑뮤어 탐침; 플라즈마; diagnostics

URI
http://hdl.handle.net/10203/48662
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237794&flag=dissertation
Appears in Collection
PH-Theses_Master(석사논문)
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