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Results 1-1 of 1 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Oxidation of Si during the growth of SiOx by ion-beam sputter deposition: In situ x-ray photoelectron spectroscopy as a function of oxygen partial pressure and deposition temperature

Kim, Kyung Joong; Kim, Jeong Won; Yang, Moon-Seung; Shin, JungHoon, PHYSICAL REVIEW B, v.74, no.15, 2006-10

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