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Development and Application of Er-Doped Silicon-Rich Silicon Nitrides and Er Silicates for On-Chip Light Sources Chang, Jee Soo; Suh, Kiseok; Yang, Moon-Seung; Shin, JungHoon, SILICON PHOTONICS II: COMPONENTS AND INTEGRATION BOOK SERIES: TOPICS IN APPLIED PHYSICS, v.119, pp.95 - 130, 2011 |
Oxidation of Si during the growth of SiOx by ion-beam sputter deposition: In situ x-ray photoelectron spectroscopy as a function of oxygen partial pressure and deposition temperature Kim, Kyung Joong; Kim, Jeong Won; Yang, Moon-Seung; Shin, JungHoon, PHYSICAL REVIEW B, v.74, no.15, 2006-10 |
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