비교란 탐침을 이용한 RF 유도플라즈마에서의 전기장 측정Electric field measurement in an inductively coupled plasma by a non-disturbing probe
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이순칠 | - |
| dc.contributor.advisor | Lee, Soon-Chil | - |
| dc.contributor.author | 이용관 | - |
| dc.contributor.author | Lee, Yong-Kwan | - |
| dc.date.accessioned | 2011-12-14T07:54:11Z | - |
| dc.date.available | 2011-12-14T07:54:11Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=112634&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48433 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1997.2, [ [ii], 38 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 비교란 탐침 | - |
| dc.subject | 압전공명 | - |
| dc.subject | 유도결합 플라즈마 | - |
| dc.subject | Inductively coupled plasma | - |
| dc.subject | Non disturbing probe | - |
| dc.subject | Piezoelectric resonance | - |
| dc.title | 비교란 탐침을 이용한 RF 유도플라즈마에서의 전기장 측정 | - |
| dc.title.alternative | Electric field measurement in an inductively coupled plasma by a non-disturbing probe | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 112634/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000953455 | - |
| dc.contributor.localauthor | 이용관 | - |
| dc.contributor.localauthor | Lee, Yong-Kwan | - |
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- PH-Theses_Master(석사논문)
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