DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Chang, Choong-Seock | - |
dc.contributor.advisor | 장충석 | - |
dc.contributor.author | Jeong, Yeong-Su | - |
dc.contributor.author | 정영수 | - |
dc.date.accessioned | 2011-12-14T07:53:44Z | - |
dc.date.available | 2011-12-14T07:53:44Z | - |
dc.date.issued | 1996 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=105936&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/48405 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1996.2, [ iii, 40 p. ] | - |
dc.description.abstract | As the need for reducing size of semiconductor chips increases, the use of plasmas for manufacturing semiconductor devices becomes more desirable. Thus the design and control of plasma generating chamber is essential for the best fit to our need. Though numerical simulation method is still in its early stage, its importance cannot be underestimated. In this article, volume averaged densities and electron temperature of $SF_6$ gas discharge are studied and the possibility of electron temperature control is tested, in which a negatively biased mesh grid is centered inside the reactive chamber. While the left room has its power source, the right room is supplied only by an energy influx from the electrons passing through the mesh grid whose voltage is manipulated. We observe the electron temperature change of the right room as the grid voltage becomes more negative. | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | SF6 discharge | - |
dc.subject | Zero-D modeling | - |
dc.subject | Mesh grid | - |
dc.subject | 전자온도 | - |
dc.subject | SF6 방전 | - |
dc.subject | 영차원 모델 | - |
dc.subject | Electron Temperature | - |
dc.title | Study on $SF_6$ gas discharge and its electron temperature control using Zero-D simulation method | - |
dc.title.alternative | 영차원 모델링을 통한 $SF_6$ 가스 방전 및 전자온도 조절에 관한 연구 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 105936/325007 | - |
dc.description.department | 한국과학기술원 : 물리학과, | - |
dc.identifier.uid | 000943504 | - |
dc.contributor.localauthor | Jeong, Yeong-Su | - |
dc.contributor.localauthor | 정영수 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.