Transformer coupled plasma의 특성 분석 및 chamber의 기하학적 구조에 따른 플라즈마 변화 특정A study on the characteristics of transformer coupled plasma and the geometrical effects of TCP chamber on plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 장홍영 | - |
| dc.contributor.advisor | Chang, Hong-Young | - |
| dc.contributor.author | 서상훈 | - |
| dc.contributor.author | Seo, Sang-Hun | - |
| dc.date.accessioned | 2011-12-14T07:52:52Z | - |
| dc.date.available | 2011-12-14T07:52:52Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=98654&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48352 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1995.2, [ iii, 79 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Transformer coupled plasma의 특성 분석 및 chamber의 기하학적 구조에 따른 플라즈마 변화 특정 | - |
| dc.title.alternative | A study on the characteristics of transformer coupled plasma and the geometrical effects of TCP chamber on plasma | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 98654/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000933237 | - |
| dc.contributor.localauthor | 서상훈 | - |
| dc.contributor.localauthor | Seo, Sang-Hun | - |
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- PH-Theses_Master(석사논문)
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