Transformer coupled plasma의 특성 분석 및 chamber의 기하학적 구조에 따른 플라즈마 변화 특정A study on the characteristics of transformer coupled plasma and the geometrical effects of TCP chamber on plasma
- Advisors
- 장홍영researcher; Chang, Hong-Youngresearcher
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 98654/325007 / 000933237
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 물리학과, 1995.2, [ iii, 79 p. ]
- Appears in Collection
- PH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.