Transformer coupled plasma의 특성 분석 및 chamber의 기하학적 구조에 따른 플라즈마 변화 특정 = A study on the characteristics of transformer coupled plasma and the geometrical effects of TCP chamber on plasma

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Advisors
장홍영researcherChang, Hong-Youngresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
98654/325007 / 000933237
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1995.2, [ iii, 79 p. ]

URI
http://hdl.handle.net/10203/48352
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=98654&flag=dissertation
Appears in Collection
PH-Theses_Master(석사논문)
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