플라즈마로 증착한 비정질 실리콘의 고속 열처리에 의한 결정화 = The crystallization using the rapid thermal annealing of plasma deposited amorphous silicon

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dc.contributor.advisor이주천-
dc.contributor.advisorLee, Choo-Chon-
dc.contributor.author김재용-
dc.contributor.authorKim, Jae-Ryong-
dc.date.accessioned2011-12-14T07:52:52Z-
dc.date.available2011-12-14T07:52:52Z-
dc.date.issued1995-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=98653&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/48351-
dc.description학위논문(석사) - 한국과학기술원 : 물리학과, 1995.2, [ [ii], 31 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.title플라즈마로 증착한 비정질 실리콘의 고속 열처리에 의한 결정화 = The crystallization using the rapid thermal annealing of plasma deposited amorphous silicon-
dc.typeThesis(Master)-
dc.identifier.CNRN98653/325007-
dc.description.department한국과학기술원 : 물리학과, -
dc.identifier.uid000933105-
dc.contributor.localauthor김재용-
dc.contributor.localauthorKim, Jae-Ryong-
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PH-Theses_Master(석사논문)
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