플라즈마로 증착한 비정질 실리콘의 고속 열처리에 의한 결정화The crystallization using the rapid thermal annealing of plasma deposited amorphous silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이주천 | - |
| dc.contributor.advisor | Lee, Choo-Chon | - |
| dc.contributor.author | 김재용 | - |
| dc.contributor.author | Kim, Jae-Ryong | - |
| dc.date.accessioned | 2011-12-14T07:52:52Z | - |
| dc.date.available | 2011-12-14T07:52:52Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=98653&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48351 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1995.2, [ [ii], 31 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 플라즈마로 증착한 비정질 실리콘의 고속 열처리에 의한 결정화 | - |
| dc.title.alternative | The crystallization using the rapid thermal annealing of plasma deposited amorphous silicon | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 98653/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000933105 | - |
| dc.contributor.localauthor | 김재용 | - |
| dc.contributor.localauthor | Kim, Jae-Ryong | - |
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