직류 플라즈마에 의한 비정질 탄소박막의 제조 = Amorphous carbon film deposition of DC plasma

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dc.contributor.advisor장홍영-
dc.contributor.advisorChang, Hong-Young-
dc.contributor.author신현의-
dc.contributor.authorShin, Hyun-Eoi-
dc.date.accessioned2011-12-14T07:52:16Z-
dc.date.available2011-12-14T07:52:16Z-
dc.date.issued1993-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68853&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/48313-
dc.description학위논문(석사) - 한국과학기술원 : 물리학과 플라즈마 전공, 1993.8, [ [ii], 37 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.title직류 플라즈마에 의한 비정질 탄소박막의 제조 = Amorphous carbon film deposition of DC plasma-
dc.typeThesis(Master)-
dc.identifier.CNRN68853/325007-
dc.description.department한국과학기술원 : 물리학과 플라즈마 전공, -
dc.identifier.uid000911338-
dc.contributor.localauthor신현의-
dc.contributor.localauthorShin, Hyun-Eoi-
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PH-Theses_Master(석사논문)
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