고속열처리에 의한 다결정 실리콘 박막의 제작과 그 특성에 관한 연구 = Fabrication of polycrystalline silicon film by rapid thermal annealing and its characteristics

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Advisors
이주천Lee, Choo-Chun
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1991
Identifier
67679/325007 / 000891065
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1991.2, [ [ii], 32 p. ]

URI
http://hdl.handle.net/10203/48261
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67679&flag=dissertation
Appears in Collection
PH-Theses_Master(석사논문)
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