RF-diode sputtering법에 의한 Y-Ba-Cu-O 초전도체의 박막공정 연구Fabrication of superconducting Y-Ba-Cu-O thin films by RF-diode sputtering method

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dc.contributor.advisor박신종-
dc.contributor.advisor이주천-
dc.contributor.advisorPark, Sin-Chong-
dc.contributor.advisorLee, Choo-Chon-
dc.contributor.author유형준-
dc.contributor.authorYoo, Hyung-Joun-
dc.date.accessioned2011-12-14T07:51:02Z-
dc.date.available2011-12-14T07:51:02Z-
dc.date.issued1990-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67151&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/48234-
dc.description학위논문(석사) - 한국과학기술원 : 물리학과, 1990.2, [ [iii], 67 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.titleRF-diode sputtering법에 의한 Y-Ba-Cu-O 초전도체의 박막공정 연구-
dc.title.alternativeFabrication of superconducting Y-Ba-Cu-O thin films by RF-diode sputtering method-
dc.typeThesis(Master)-
dc.identifier.CNRN67151/325007-
dc.description.department한국과학기술원 : 물리학과, -
dc.identifier.uid000861721-
dc.contributor.localauthor유형준-
dc.contributor.localauthorYoo, Hyung-Joun-
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PH-Theses_Master(석사논문)
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