Browse "Graduate School of Nanoscience and Technology(나노과학기술대학원)" bySubjectwafer bonding

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Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding

Jang, Heejun; Kang, Il-Suk; Kim, Jihye; Kim, Jonghyun; Cha, Yun Jeong; Yoon, Dong Kiresearcher; Lee, Wonheeresearcher, NANOTECHNOLOGY, v.28, no.37, pp.1361 - 6528, 2017-09

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