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In-situ Control of Oxygen Content and the Effect on PL Intensity of SiOx and SiOx/SiOx Superlattices Grown by Physical Deposition Kim, Kyungjoong; Moon, Daewon; Yang, Moonseung; Jhe, Jihong; Shin, JungHoon; Hong, Seunghui; Choi, Sukho, Materials Research Society, 2003 |
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