Showing results 5 to 6 of 6
Oxidation of Si during the growth of SiOx by ion-beam sputter deposition: In situ x-ray photoelectron spectroscopy as a function of oxygen partial pressure and deposition temperature Kim, Kyung Joong; Kim, Jeong Won; Yang, Moon-Seung; Shin, JungHoon, PHYSICAL REVIEW B, v.74, no.15, 2006-10 |
Visible photoluminescence of SiNx thin films grown by ion beam sputter deposition Shin, JungHoon; Yang, Moon-Seung; Kim, Kyungjoon, The 2nd KASIT International Symposium on Frontier Issues in NBI Technologies, 2003 |
Discover